Friday, March 12, 2010 ..:: Applications » Semiconductor » CVD/Diffusion » Vertical Carriers ::.. Register  Login
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Vertical Carriers

POCO has vertical carriers and mated pedestals designed to fit all furnaces. POCO's unique manufacturing processes allow the carrier base to be modified to fit the customer's existing pedestal or a new pedestal can be designed to meet specified requirements.

 

SUPERSiC® surfaces provide better film adhesion for reduced particle generation. The coefficient of thermal expansion of the deposited films is a close match to the SUPERSiC carriers. Longer run cycles between cleanings will reduce down time.

 

Design flexibility due to a unique manufacturing process allows POCO to produce vertical carriers that are high strength with reduced surface area and thermal mass.

 

Increased production can be gained by reduced downtime for cleaning. SUPERSiC carriers can complete more run cycles between cleanings and remain dimensionally stable throughout their lifetime. The lower thermal mass of the carriers allows for faster cycle times in the furnace. Yield improvements can be seen due to reduced particle generation.

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Material & Services

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For over forty years, POCO has been recognized for producing the world's best graphites.

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News, Quality Program and Contact information for Poco Graphite

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