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Horizontal Carriers |
POCO offers wafer carrier
solutions that all horizontal furnace systems.
SUPERSiC® products include intermediate carriers, several styles of horizontal
carriers, baffle assemblies, cage boats, dummy wafers and pickup tools.
POCO's
SiC horizontal carriers are used extensively in polysilicon,
silicon nitride, and doped oxide CVD processes, as
well as in gate oxide processes. In high temperature
anneals and implant drive furnaces, POCO's uncoated
SiC carriers have shown performance that is without
equal. Individual fabs have been using the same carriers
for over 3 years, through multiple clean and maintenance
cycles, in which the process tubes and other furnace
internals have been replaced. |
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Material & Services |  | Materials & Services For over forty years, POCO has been recognized for producing the world's best graphites. |  | Corporate News, Quality Program and Contact information for Poco Graphite |
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Additional Information | | Entegris Entegris welcomes POCO to the family. | | How to Buy POCO products are available through a variety of outlets. | | Quality Poco Graphite is committed to providing the highest quality graphite materials to its customers. | | Literature Download information about specific POCO products or Material Safety Data Sheets (MSDS). | | Contacts Get address, phone, fax and email information for POCO and its Distributors. | | Careers Note that you will be redirected to our parent company website, entegris.com, to search available positions. | | Training EDM Training Classes Free to the Industry |
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