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Etch
Chamber Components |
Graphite and SUPERSiC
components are produced to customer prints.
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Silicon Carbide
SUPERSiC® silicon carbide, is
typically used for plasma etch electrodes, showerheads,
focus rings, hot edge rings, confinement rings and
other chamber components. SUPERSiC is the ideal
material for current and legacy equipment as replacement
components for silicon, quartz and other ceramics to
improve process performance.
Currently, all SUPERSiC etch chamber components are
custom made for OEMs to go in the next generation equipment. |
Graphite
Currently, all graphite etch chamber components
are machined to customer prints. Typical graphite parts
are backing rings, edge rings, backing plates, cathodes,
bias plugs and pins. Materials used for these applications
are DFP-1 and DFP-2. |
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Additional Information | | Entegris Entegris welcomes POCO to the family. | | How to Buy POCO products are available through a variety of outlets. | | Quality Poco Graphite is committed to providing the highest quality graphite materials to its customers. | | Literature Download information about specific POCO products or Material Safety Data Sheets (MSDS). | | Contacts Get address, phone, fax and email information for POCO and its Distributors. | | Careers Come join our team! | | Training EDM Training Classes Free to the Industry |
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