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ZEE-2 |
POCO has been working closely with OEMs and fab
customers to develop materials to support the requirements
of the source and beam line areas of the implant chamber.
Based on this work, POCO has expanded the existing
family of materials, POCO PyroGraph, DFP-3-2 and SCF,
targeted at the implant area to include POCO ZEE. Regardless
of the type of implant, whether it is buried layer,
N or P-well, punch through stop, SD, or Vt adjust,
POCO has the right material to support the technology.
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POCO ZEE |
ZEE is a hard, wear-resistant material. This next generation
ion implant material offers improved performance through
the entire range of low to high-energy implants. POCO
ZEE is high-purity, isotropic graphite with a true 1-micron
grain size. A unique manufacturing process yields a graphite
with elevated hardness and strengths that exhibits reduced
wear and particle generation even in the highest energy
environments. For more information, view the ZEE
performance White Paper. |
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| microns |
1 |
µ-ohm-in |
1,260 |
| g/cc |
1.77 |
SSH |
100 |
| psi |
15,000 |
µ-in/in/C |
8.4 |
| psi |
30,000 |
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99.9995% |
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Additional Information | | Entegris Entegris welcomes POCO to the family. | | How to Buy POCO products are available through a variety of outlets. | | Quality Poco Graphite is committed to providing the highest quality graphite materials to its customers. | | Literature Download information about specific POCO products or Material Safety Data Sheets (MSDS). | | Contacts Get address, phone, fax and email information for POCO and its Distributors. | | Careers Note that you will be redirected to our parent company website, entegris.com, to search available positions. | | Training EDM Training Classes Free to the Industry | | EDM Blog Keep up to date with what's new at POCO and in the industry. |
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