POCO has vertical carriers
and mated pedestals designed to fit all furnaces. POCO's
unique manufacturing processes allow the carrier base
to be modified to fit the customer's existing pedestal
or a new pedestal can be designed to meet specified
SUPERSiC® surfaces provide better
film adhesion for reduced particle generation. The
coefficient of thermal expansion of the deposited films
is a close match to the SUPERSiC carriers. Longer run
cycles between cleanings will reduce down time.
flexibility due to a unique manufacturing process allows
POCO to produce vertical carriers that are high strength
with reduced surface area and thermal mass.
production can be gained by reduced downtime for cleaning.
SUPERSiC carriers can complete more run cycles between
cleanings and remain dimensionally stable throughout
their lifetime. The lower thermal mass of the carriers
allows for faster cycle times in the furnace. Yield
improvements can be seen due to reduced particle generation.