POCO's line of SUPERSiC® silicon carbide dummy and baffle wafers
provide the user with maximum flexibility while meeting SEMI standard wafer dimensions.
Wafers can be specified as full round or with user defined notches or flats.
They are available in sizes up to 300mm.
POCO offers user defined serialization
on each wafer regardless of size or thickness. Custom
engraving eliminates the risk of cross contamination
in the fab.
SUPERSiC
dummy wafers contain no silicon backfill and have high
purity and durability. Due to their acid resistance,
SUPERSiC wafers can be cleaned and reused indefinitely
in LPCVD or diffusion processes and can withstand extended
high temperature cycling |