POCO PyroGraph

Pyrograph is pyrolytically infiltrated graphite. POCO's proprietary process infiltrates the base material to a minimum depth of 0.1 inch throughout the entire surface of the component. This process seals the graphite surface and reduces particle generation in the chamber.

The manufacturing process begins with a specially formulated graphite. Once a part has been machined, it goes through a purification process that typically results in a purity level of < 2ppm. The final step is a pyrolytic vapor infiltration that produces a hard, uniform surface. Vapor phase processing allows deeper penetration of the pyrolytic carbon into the base material.

Typical Purified Poco Graphite: GDMS Elemental Data Analysis

Element	Concentration (ppm wt)
Na	<0.005*
Mg	<0.005*
Al	0.09
K	<0.005*
Ca	<0.005*
Ti	0.02
V	0.002
Mn	<0.001*
Fe	0.03
Ni	0.01
Cu	<0.001*
Zn	<0.005*
*Denotes value below detection limits

Typical Material Properties

	ZEE	DFP-3-2	SCF-2	PYROGRAPH
Particle Size	1	4	6	5
Apparent Density (g/cc)	1.77	1.82	1.77	1.56
Flexural Strength (psi)	15,000	12,000	13,500	7,750
Compressive Strength (psi)	30,000	20,000	25,000	14,200
Electrical Resistivity (µ-ohm-in)	1,260	600	960	790
Shore Hardness	100	74	91	66
CTE(µ-in/in/C)	8.4	8.1	7.6	7.5
Purity	99.9995%	99.9995%	99.9995%	99.9995%
Pyrolytic Carbon				12% pick-up

Additional Information

Entegris

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